Agasiev, A.A. and Akhundov, Ch.G. and Mamedov, H.M. and Mamedov, M.Z. and Sarmasov, S.N. (2010) films. Journal of NANO and MICROSYSTEM TECHNIQUE (4).
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Abstract
The films of SrTiO3 are obtained by the method of magnetron sputtering. The structure and morphology of the films are considered. The pseudo grain sizes on an average are determinate to be ~ lâ2 nm and are in good agreement with the area of coherent scattering. Interatomic distances TiâO, SrâO, OâO in disordered and poly-crystalline films are estimated. The film surface is investigated by the atomic force and scanning electron microscopes. Keywords: thin films, magnetron sputtering, SrTiO3, surface morphology
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10254 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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