Nano Archive

films

Agasiev, A.A. and Akhundov, Ch.G. and Mamedov, H.M. and Mamedov, M.Z. and Sarmasov, S.N. (2010) films. Journal of NANO and MICROSYSTEM TECHNIQUE (4).

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Abstract

The films of SrTiO3 are obtained by the method of magnetron sputtering. The structure and morphology of the films are considered. The pseudo grain sizes on an average are determinate to be ~ l—2 nm and are in good agreement with the area of coherent scattering. Interatomic distances Ti—O, Sr—O, O—O in disordered and poly-crystalline films are estimated. The film surface is investigated by the atomic force and scanning electron microscopes. Keywords: thin films, magnetron sputtering, SrTiO3, surface morphology

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10254
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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