Smolin, V.K. (2010) Liquid Nitrogen Use for Forming Microelectronic Structures. Journal of NANO and MICROSYSTEM TECHNIQUE (4).
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There are considered the issues related to the low-temperature processing use in the process of forming microelectronic structures. Efficiency of the processing in the liquid Nitrogen under cyclic effect is presented. Keywords: low-temperature processing, material modification, heterostructure, defect rearrangement
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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