Nano Archive

Liquid Nitrogen Use for Forming Microelectronic Structures

Smolin, V.K. (2010) Liquid Nitrogen Use for Forming Microelectronic Structures. Journal of NANO and MICROSYSTEM TECHNIQUE (4).

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Official URL: http:// www.microsystems.ru

Abstract

There are considered the issues related to the low-temperature processing use in the process of forming microelectronic structures. Efficiency of the processing in the liquid Nitrogen under cyclic effect is presented. Keywords: low-temperature processing, material modification, heterostructure, defect rearrangement

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10253
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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