Korneev, I.A. and Prinz, V.Ya. and Seleznev, V.A. (2010) Chips with Semiconductor Tube-Probes for Scanning Smelling Microscopy. Journal of NANO and MICROSYSTEM TECHNIQUE (4).
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Official URL: http:// www.microsystems.ru
Abstract
A method of mass production of chips with tubular InÐ /InxGa1-xAs/InyGa1-yAs probes for scanning tunnelling microscopy (STM) is described. This method includes standard procedures of optical lithography and selective anisotropic etching of InP substrate, that leads to the formation of rolled-up tubes from strained InxGa1-xAs/InyGa1-yAs heterofilms and simultaneous formation of chips. Created chips with semiconductor tube-probes are promising for high-vacuum scanning tunnelling microscopy and spectroscopy, spin tunnelling microscopy and near-field microscopy applications. Keywords: scanning tunnelling microscopy, semiconductor tube-probes, self-rolling of strained heterofilms
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10248 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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