Egorov, V.V. (2010) Measurement of Shift in Nano and Micro Structures. Journal of NANO and MICROSYSTEM TECHNIQUE (3).
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Official URL: http:// www.microsystems.ru
Abstract
It is obtained algorithms of shift in nano and micro structures. Keywords: shift, field, signal, algorithm
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10242 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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