Nano Archive

Measurement of Shift in Nano and Micro Structures

Egorov, V.V. (2010) Measurement of Shift in Nano and Micro Structures. Journal of NANO and MICROSYSTEM TECHNIQUE (3).

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It is obtained algorithms of shift in nano and micro structures. Keywords: shift, field, signal, algorithm

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10242
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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