Nano Archive

Thin-Film Capacitance Microelectromechanical Systems with the Deformable Dielectric

Belozubov, E.M. and Belozubova, N.E. and Mokrov, E.A. (2010) Thin-Film Capacitance Microelectromechanical Systems with the Deformable Dielectric. Journal of NANO and MICROSYSTEM TECHNIQUE (2).

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Official URL: http:// www.microsystems.ru

Abstract

Thin-film capacitance microelectromechanical systems with the deformable dielectric with planar and cylin­drical electrodes are submitted. The ratio of basic elements is optimized. Keywords: thin-film capacitive microelectromechanical systems (TCMEMS), deformable monolithic dielectric.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10238
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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