Belozubov, E.M. and Belozubova, N.E. and Mokrov, E.A. (2010) Thin-Film Capacitance Microelectromechanical Systems with the Deformable Dielectric. Journal of NANO and MICROSYSTEM TECHNIQUE (2).
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Thin-film capacitance microelectromechanical systems with the deformable dielectric with planar and cylinÂdrical electrodes are submitted. The ratio of basic elements is optimized. Keywords: thin-film capacitive microelectromechanical systems (TCMEMS), deformable monolithic dielectric.
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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