Belozubov, E.M. and Belozubova, N.E. and Mokrov, E.A. (2010) Thin-Film Capacitance Microelectromechanical Systems with the Deformable Dielectric. Journal of NANO and MICROSYSTEM TECHNIQUE (2).
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Official URL: http:// www.microsystems.ru
Abstract
Thin-film capacitance microelectromechanical systems with the deformable dielectric with planar and cylinÂdrical electrodes are submitted. The ratio of basic elements is optimized. Keywords: thin-film capacitive microelectromechanical systems (TCMEMS), deformable monolithic dielectric.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10238 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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