Nano Archive

A Microsensor for Residual Pressure ControlBased on Periodical Heat Transfer

Bokhov, O.S. and Broiko, A.P. and Korliakov, A.V. and Luchinin, V.V. (2010) A Microsensor for Residual Pressure ControlBased on Periodical Heat Transfer. Journal of NANO and MICROSYSTEM TECHNIQUE (2).

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Official URL: http:// www.microsystems.ru

Abstract

The existing sensors for pressure measurement below atmosphere pressure have a narrow range, low accuracy and short lifetime because there design and methodic of measurement. In this article are suggested the methodic that uses periodical heat transfer in thermo sensor. This one allow on the one hand to increase sensitivity and accuracy and on another hand to decrease time response of the sensor due to the methodic of measurement in a time domain instead of amplitude values. Keywords: pressure, heat transfer, time domain, MEMS, thermal.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10228
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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