Pivonenkov, B.I. and Shkolnikov, V.Ð. (2010) Single- and Three-Axis Piezoresistive Accelerometers with Air Damping. Journal of NANO and MICROSYSTEM TECHNIQUE (1).
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Constructions of three kinds of piezoresistive accelerometers with air damping are described: single- and three-axis accelerometers with separate inertia mass and integral single-axis accelerometer (MEMS-accelerometer). Experimental data are given. Accelerometers have high dynamic and strength properties. An advisability of proÂduction of MEMS-three-axis piezoresistive accelerometer is shown. Keywords: piezoresistive accelerometer, sensor, MEMS (Microelectromechanical systems), three-axis accele-rometer, air damping, vibration strength, shock resistance.
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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