Pivonenkov, B.I. and Shkolnikov, V.Ð. (2010) Single- and Three-Axis Piezoresistive Accelerometers with Air Damping. Journal of NANO and MICROSYSTEM TECHNIQUE (1).
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Abstract
Constructions of three kinds of piezoresistive accelerometers with air damping are described: single- and three-axis accelerometers with separate inertia mass and integral single-axis accelerometer (MEMS-accelerometer). Experimental data are given. Accelerometers have high dynamic and strength properties. An advisability of proÂduction of MEMS-three-axis piezoresistive accelerometer is shown. Keywords: piezoresistive accelerometer, sensor, MEMS (Microelectromechanical systems), three-axis accele-rometer, air damping, vibration strength, shock resistance.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10226 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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