Nano Archive

Single- and Three-Axis Piezoresistive Accelerometers with Air Damping

Pivonenkov, B.I. and Shkolnikov, V.М. (2010) Single- and Three-Axis Piezoresistive Accelerometers with Air Damping. Journal of NANO and MICROSYSTEM TECHNIQUE (1).

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Constructions of three kinds of piezoresistive accelerometers with air damping are described: single- and three-axis accelerometers with separate inertia mass and integral single-axis accelerometer (MEMS-accelerometer). Experimental data are given. Accelerometers have high dynamic and strength properties. An advisability of pro­duction of MEMS-three-axis piezoresistive accelerometer is shown. Keywords: piezoresistive accelerometer, sensor, MEMS (Microelectromechanical systems), three-axis accele-rometer, air damping, vibration strength, shock resistance.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10226
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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