Nano Archive

Embodiments of Electrostatic Torsion Microscaners of Optimized Functional parameters

Efremov, G.I. and Mukhurov, N.I. and Zhvavyi, S.P. (2010) Embodiments of Electrostatic Torsion Microscaners of Optimized Functional parameters. Journal of NANO and MICROSYSTEM TECHNIQUE (1).

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Official URL: http:// www.microsystems.ru

Abstract

In the present work we have considered constructive principles of formation electrostatic torsion micro scanners with the expanded range of a controlled phase of an operational cycle. We offer calculation formulas, circuits of devices and their base dependences of voltage U on a rotation angel a of an anchor are resulted. Keywords: MEMS, electrostatic microscanners, designs, optimization of parameters.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10220
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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