Efremov, G.I. and Mukhurov, N.I. and Zhvavyi, S.P. (2010) Embodiments of Electrostatic Torsion Microscaners of Optimized Functional parameters. Journal of NANO and MICROSYSTEM TECHNIQUE (1).
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In the present work we have considered constructive principles of formation electrostatic torsion micro scanners with the expanded range of a controlled phase of an operational cycle. We offer calculation formulas, circuits of devices and their base dependences of voltage U on a rotation angel a of an anchor are resulted. Keywords: MEMS, electrostatic microscanners, designs, optimization of parameters.
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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