Efremov, G.I. and Mukhurov, N.I. and Zhvavyi, S.P. (2010) Embodiments of Electrostatic Torsion Microscaners of Optimized Functional parameters. Journal of NANO and MICROSYSTEM TECHNIQUE (1).
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Abstract
In the present work we have considered constructive principles of formation electrostatic torsion micro scanners with the expanded range of a controlled phase of an operational cycle. We offer calculation formulas, circuits of devices and their base dependences of voltage U on a rotation angel a of an anchor are resulted. Keywords: MEMS, electrostatic microscanners, designs, optimization of parameters.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10220 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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