Gavrilov, S.A. and Gerasimenko, N.N. and Rygalin, B.N. and Timoshenkov, S.P. (2009) Nanoengineering â Nanotechnology Realization in the Real Production. Journal of NANO and MICROSYSTEM TECHNIQUE (12).
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Official URL: http:// www.microsystems.ru
Abstract
The main problems of nanoengineering, which commonly implies a system of technical methods and tools for the nanosystem formation including nanomatenals, nanodevices and nanoelectromechanical systems, are disÂcussed. The term nanoengineering is considered primarily on the examples in the field of nano-related electronic devices and systems. Keywords: nanoengineering, nanomaterials, nanotechnology
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10216 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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