Amelichev, V.V. and Fedorov, R.A. and Godovitsyn, I.V. and Maltsev, P.P. and Saikin, D.A. (2009) Characterization of SOI Wafer Based Experimental MEMS Accelerometer. Journal of NANO and MICROSYSTEM TECHNIQUE (12).
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Official URL: http:// www.microsystems.ru
Abstract
A technology for fabrication of MEMS-transducers on SOI-wafers is developed. A sample differential capacitive MEMS-accelerometer is designed with its parameters evaluated using analytical expressions and finite-element modeling. Using developed technology the designed MEMS-accelerometer is fabricated. Pull-in voltage and sensitivity of the MEMS-accelerometer are measured and good agreement with calculated values is demonÂstrated. Approaches for improving of parameters of the MEMS-accelerometer are proposed. Keywords: MEMS, SOI-wafer, accelerometer.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10214 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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