Nano Archive

Characterization of SOI Wafer Based Experimental MEMS Accelerometer

Amelichev, V.V. and Fedorov, R.A. and Godovitsyn, I.V. and Maltsev, P.P. and Saikin, D.A. (2009) Characterization of SOI Wafer Based Experimental MEMS Accelerometer. Journal of NANO and MICROSYSTEM TECHNIQUE (12).

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A technology for fabrication of MEMS-transducers on SOI-wafers is developed. A sample differential capacitive MEMS-accelerometer is designed with its parameters evaluated using analytical expressions and finite-element modeling. Using developed technology the designed MEMS-accelerometer is fabricated. Pull-in voltage and sensitivity of the MEMS-accelerometer are measured and good agreement with calculated values is demon­strated. Approaches for improving of parameters of the MEMS-accelerometer are proposed. Keywords: MEMS, SOI-wafer, accelerometer.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10214
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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