Belozubov, E.M. and Belozubova, N.E. (2009) Thin-Film Strain Gauge Microelectromechanical Systems with IdenticalStrain-Sensing Elements and Solid Center Diaphragms. Journal of NANO and MICROSYSTEM TECHNIQUE (11).
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Thin-film strain gauge microelectromechanical systems (TSMEMS) with identical strain-sensing elements and solid center diaphragms are studied. We show merits and new capabilities of such TSMEMS under transient temÂperatures. Keywords: thin-film strain gauge microelectromechanical systems (TSMEMS), strain-sensing element, diaÂphragm, solid center.
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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