Nano Archive

Thin-Film Strain Gauge Microelectromechanical Systems with IdenticalStrain-Sensing Elements and Solid Center Diaphragms

Belozubov, E.M. and Belozubova, N.E. (2009) Thin-Film Strain Gauge Microelectromechanical Systems with IdenticalStrain-Sensing Elements and Solid Center Diaphragms. Journal of NANO and MICROSYSTEM TECHNIQUE (11).

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Official URL: http:// www.microsystems.ru

Abstract

Thin-film strain gauge microelectromechanical systems (TSMEMS) with identical strain-sensing elements and solid center diaphragms are studied. We show merits and new capabilities of such TSMEMS under transient tem­peratures. Keywords: thin-film strain gauge microelectromechanical systems (TSMEMS), strain-sensing element, dia­phragm, solid center.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10210
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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