Belozubov, E.M. and Belozubova, N.E. (2009) Thin-Film Strain Gauge Microelectromechanical Systems with IdenticalStrain-Sensing Elements and Solid Center Diaphragms. Journal of NANO and MICROSYSTEM TECHNIQUE (11).
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Official URL: http:// www.microsystems.ru
Abstract
Thin-film strain gauge microelectromechanical systems (TSMEMS) with identical strain-sensing elements and solid center diaphragms are studied. We show merits and new capabilities of such TSMEMS under transient temÂperatures. Keywords: thin-film strain gauge microelectromechanical systems (TSMEMS), strain-sensing element, diaÂphragm, solid center.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10210 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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