Nano Archive

Concerning the Introduction of Microsystem Techniques

Alflmov, S.M. (2009) Concerning the Introduction of Microsystem Techniques. Journal of NANO and MICROSYSTEM TECHNIQUE (11).

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The principal concepts, terms and definitions for products of microsystem technology with indication of microsystems forms and functional devices are presented. Keywords: microsystem techniques, definitions, terms, concepts.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10203
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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