Alflmov, S.M. (2009) Concerning the Introduction of Microsystem Techniques. Journal of NANO and MICROSYSTEM TECHNIQUE (11).
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http:// www.microsystems.ru
The principal concepts, terms and definitions for products of microsystem technology with indication of microsystems forms and functional devices are presented. Keywords: microsystem techniques, definitions, terms, concepts.
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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