Nano Archive

Concerning the Introduction of Microsystem Techniques

Alflmov, S.M. (2009) Concerning the Introduction of Microsystem Techniques. Journal of NANO and MICROSYSTEM TECHNIQUE (11).

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http:// www.microsystems.ru

Abstract

The principal concepts, terms and definitions for products of microsystem technology with indication of microsystems forms and functional devices are presented. Keywords: microsystem techniques, definitions, terms, concepts.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10203
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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