Alflmov, S.M. (2009) Concerning the Introduction of Microsystem Techniques. Journal of NANO and MICROSYSTEM TECHNIQUE (11).
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Official URL: http:// www.microsystems.ru
Abstract
The principal concepts, terms and definitions for products of microsystem technology with indication of microsystems forms and functional devices are presented. Keywords: microsystem techniques, definitions, terms, concepts.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10203 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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