Nano Archive

Application of Virtual Scanning Electron Microscope for Parameters Characterization of Atomic Nanolithograph Microlenses

Baturin, А.S. and Melentiev, P.N. and Sheshin, Е.Р. and Zablotskiy, A.V. (2009) Application of Virtual Scanning Electron Microscope for Parameters Characterization of Atomic Nanolithograph Microlenses. Journal of NANO and MICROSYSTEM TECHNIQUE (11).

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Abstract

In this paper we present results of geometrical parameters' measurements of objects which size is comparable with SEM electron probe diameter — open aperture with diameter about 50 nm made in ultra thick membrane (with a thickness less then 50 nm), having use as a microlense in the atom projection nanolithograph. For the first time in microscopy of such objects we have implemented an approach based on supplementing experimental data of standard SEM by computer simulated results of "virtual SEM". Keywords: SEM, nanometrology, atomic optic, nanolithography.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10202
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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