Nano Archive

Thin-Film Strain Gauge Microelectromechanical Systems withIdentical Strain-Sensing Elements

Belozubov, E.M. and Belozubova, N.E. and Vasiliev, V.А. (2009) Thin-Film Strain Gauge Microelectromechanical Systems withIdentical Strain-Sensing Elements. Journal of NANO and MICROSYSTEM TECHNIQUE (10).

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http:// www.microsystems.ru

Abstract

Thin-film strain gauge microelectromechanical systems (TSMEMS) with identical strain-sensing elements are stu­died. Optimum element relations in different variants of such TSMEMS under transient temperatures are determined. Keywords: thin-film strain gauge microelectromechanical systems (TSMEMS), identical strain-sensing ele­ments, transient temperature.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10200
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:39
Last Modified:09 Dec 2010 09:29

Repository Staff Only: item control page