Belozubov, E.M. and Belozubova, N.E. and Vasiliev, V.Ð. (2009) Thin-Film Strain Gauge Microelectromechanical Systems withIdentical Strain-Sensing Elements. Journal of NANO and MICROSYSTEM TECHNIQUE (10).
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Thin-film strain gauge microelectromechanical systems (TSMEMS) with identical strain-sensing elements are stuÂdied. Optimum element relations in different variants of such TSMEMS under transient temperatures are determined. Keywords: thin-film strain gauge microelectromechanical systems (TSMEMS), identical strain-sensing eleÂments, transient temperature.
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:39|
|Last Modified:||09 Dec 2010 09:29|
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