Adamov, D.Yu. and Adamov, Yu.F. (2009) Nanowires for Nanoelectronics. Journal of NANO and MICROSYSTEM TECHNIQUE (10).
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Abstract
In this paper, it is presented the review of nanowires generation technology for the electronic devices. There are discussed self generation processes of silicon and heterostructure nanowires and the properties of MOS transistors structures, based on nanowires. Keywords: nanowire, nanoelectronics, carbonic nanotube, planar technology, heterostructure nanowire, lithoÂgraphic techniques, nanowire technology.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10192 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:39 |
| Last Modified: | 09 Dec 2010 09:29 |
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