Nano Archive

MEMS Commutators for RF Devices

Efimov, A.G. and Il'ichev, E.A. and Nemirovskii, V.E. and Vlasenko, V.A. (2009) MEMS Commutators for RF Devices. Journal of NANO and MICROSYSTEM TECHNIQUE (10).

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The research results of microelectromechanical commutators for RF MEMS, obtained at the base of diamond like carbon films (DCLF) by thermal dissociation of polyphenylmethylsiloxane are presented at the first time. DLCF using allow to put out electrodes sealing effects, to decrease the signal losses (up to 100 dB) and to implement the high speed of commutation (-10 ns) of super high frequency (up to 2 GHz on Si and 10 GHz on GaAs substrates). Keywords: phase converter, microelectromechanical commutator, diamond-like carbon films, plasma-chemical etching, radio-frequency microelectromechanical system — RF MEMS.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10191
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:39
Last Modified:09 Dec 2010 09:29

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