Nano Archive

Stray Capacitance Compensation Technique in Scanning Capacitance Microscopy

Polyakov, V.V. (2009) Stray Capacitance Compensation Technique in Scanning Capacitance Microscopy. Journal of NANO and MICROSYSTEM TECHNIQUE (9).

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Specially designed probe and novel stray capacitance compensation technique for 2D dopant profiles characterization of semiconductor structures by scanning capacitance microscopy (SCM) have been advanced. Cor­responding unit for SCM realization has been engineered. Advantages of using compensation technique and high (10—20 nm) spatial resolution of SCM are demonstrated on samples with dopant concentration in the range 1015—1020 cm-3. Keywords: SCM, capacitance microscopy, SPM, AFM, probe microscopy, dopant profile.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10188
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:39
Last Modified:09 Dec 2010 09:29

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