Nano Archive

Measuring Tools Computer Simulation for Nanometrology

Baturin, А.S. and Bormashov, V.S. and Sheshin, Е.Р. and Zablotskiy, A.V. (2009) Measuring Tools Computer Simulation for Nanometrology. Journal of NANO and MICROSYSTEM TECHNIQUE (8).

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http:// www.microsystems.ru

Abstract

There is a problem of numerical measurements at the nanoscale range where finite probe size of scanning mi­croscopes leads to discrepancy between image and true shape of studied nanoobjects. To solve this problem we propose to supplement real experimental data with simulation results obtained by computer modeling. Typical order of measurements is the sequence "specimen—image—model—parameters" is replaced by the sequence "parameterized model of specimen—simulation of image formation—fitting parameters of specimen shape until the best coincidence between a real image and model one". Keywords: AFM, SEM, nanometrology.

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10173
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:39
Last Modified:09 Dec 2010 09:29

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