Baturin, Ð.S. and Bormashov, V.S. and Sheshin, Ð.Ð . and Zablotskiy, A.V. (2009) Measuring Tools Computer Simulation for Nanometrology. Journal of NANO and MICROSYSTEM TECHNIQUE (8).
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Official URL: http:// www.microsystems.ru
Abstract
There is a problem of numerical measurements at the nanoscale range where finite probe size of scanning miÂcroscopes leads to discrepancy between image and true shape of studied nanoobjects. To solve this problem we propose to supplement real experimental data with simulation results obtained by computer modeling. Typical order of measurements is the sequence "specimenâimageâmodelâparameters" is replaced by the sequence "parameterized model of specimenâsimulation of image formationâfitting parameters of specimen shape until the best coincidence between a real image and model one". Keywords: AFM, SEM, nanometrology.
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10173 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:39 |
| Last Modified: | 09 Dec 2010 09:29 |
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